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1

Advances in multichannel spectroscopic ellipsometry

R.W Collins, Ilsin An, H Fujiwara, Joungchel Lee, Yiwei Lu, Joohyun Koh, P.I Rovira

Journal:

Thin Solid Films

Année:

1998

Langue:

english

Fichier:

PDF, 1.02 MB

english, 1998

2

Application of real-time spectroscopic ellipsometry for the development of low-temperature diamond film growth processes

Joungchel Lee, Byungyou Hong, R Messier, R.W Collins

Journal:

Thin Solid Films

Année:

1998

Langue:

english

Fichier:

PDF, 145 KB

english, 1998

3

Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Review of Scientific Instruments

Année:

1998

Langue:

english

Fichier:

PDF, 881 KB

english, 1998

4

Analysis of the ellipsometric spectra of amorphous carbon thin films for evaluation of the sp3-bonded carbon content

Lee, Joungchel, Collins, R.W., Veerasamy, V.S., Robertson, J.

Journal:

Diamond and Related Materials

Année:

1998

Langue:

english

Fichier:

PDF, 1.15 MB

english, 1998

5

[IEEE VTC-2005-Fall. 2005 IEEE 62nd Vehicular Technology Conference, 2005. - Dallas, TX, USA (25-28 Sept., 2005)] VTC-2005-Fall. 2005 IEEE 62nd Vehicular Technology Conference, 2005. - Outdoor radio channel measurements at 2.35 GHz for WiBro systems

Lee, R., Joungchel Kim,, Jaehwang Yu,, Sanghoon Seo,, Jung Hwa Wui,, Seokyong Shon,, Jong Min Cheong,, Dongwoo Kim,

Année:

2005

Langue:

english

Fichier:

PDF, 556 KB

english, 2005

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Lithography focus/exposure control and corrections to improve CDU at post etch step

Cain, Jason P., Sanchez, Martha I., Kim, Young Ki, Yelverton, Mark, Tristan, John, Lee, Joungchel, Gutjahr, Karsten, Hsu, Ching-Hsiang, Wei, Hong, Wang, Lester, Li, Chen, Subramany, Lokesh, Chung, Woo

Année:

2014

Langue:

english

Fichier:

PDF, 661 KB

english, 2014

7

Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data

Ilsin An, Joungchel Lee, Byungyou Hong, R.W Collins

Journal:

Thin Solid Films

Année:

1998

Langue:

english

Fichier:

PDF, 192 KB

english, 1998

8

Composition and temperature dependence of the optical properties of Zn_1–x Cd_xSe (0 ≤ x ≤ 0.34) below the fundamental bandgap

Lee, Joungchel, Flack, F., Samarth, N., Collins, R. W.

Journal:

Année:

1997

Langue:

english

Fichier:

PDF, 366 KB

english, 1997

9

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry

Lee, Joungchel, Collins, Robert W.

Journal:

Année:

1998

Langue:

english

Fichier:

PDF, 268 KB

english, 1998

10

Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Journal of the Optical Society of America A

Année:

2001

Langue:

english

Fichier:

PDF, 162 KB

english, 2001

11

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films

Lee, Joungchel, Koh, Joohyun, Collins, R. W.

Journal:

Année:

2000

Langue:

english

Fichier:

PDF, 116 KB

english, 2000

12

Analysis of amorphous carbon thin films by spectroscopic ellipsometry

Joungchel Lee, R.W Collins, V.S Veerasamy, J Robertson

Journal:

Journal of Non-Crystalline Solids

Année:

1998

Langue:

english

Fichier:

PDF, 99 KB

english, 1998

13

Effects of processing conditions on the growth of nanocrystalline diamond thin films: real time spectroscopic ellipsometry studies

Hong, Byungyou, Lee, Joungchel, Collins, R.W., Kuang, Yalei, Drawl, W., Messier, R., Tsong, T.T., Strausser, Y.E.

Journal:

Diamond and Related Materials

Année:

1997

Langue:

english

Fichier:

PDF, 5.85 MB

english, 1997

14

Spectroellipsometry for characterization of Zn1−xCdxSe multilayered structures on GaAs

Lee, Joungchel, Collins, R. W., Heyd, A. R., Flack, F., Samarth, N.

Journal:

Applied Physics Letters

Année:

1996

Langue:

english

Fichier:

PDF, 340 KB

english, 1996

15

Real time spectroellipsometry for optimization of diamond film growth by microwave plasma-enhanced chemical vapor deposition from CO/H2 mixtures

Lee, Joungchel, Hong, Byungyou, Messier, R., Collins, R. W.

Journal:

Journal of Applied Physics

Année:

1996

Langue:

english

Fichier:

PDF, 359 KB

english, 1996

16

Rotating-compensator multichannel ellipsometry for characterization of the evolution of nonuniformities in diamond thin-film growth

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Applied Physics Letters

Année:

1998

Langue:

english

Fichier:

PDF, 264 KB

english, 1998

17

Dual rotating-compensator multichannel ellipsometer: Instrument development for high-speed Mueller matrix spectroscopy of surfaces and thin films

Lee, Joungchel, Koh, Joohyun, Collins, R. W.

Journal:

Review of Scientific Instruments

Année:

2001

Langue:

english

Fichier:

PDF, 504 KB

english, 2001

18

Nucleation and bulk film growth kinetics of nanocrystalline diamond prepared by microwave plasma-enhanced chemical vapor deposition on silicon substrates

Lee, Joungchel, Hong, Byungyou, Messier, R., Collins, R. W.

Journal:

Applied Physics Letters

Année:

1996

Langue:

english

Fichier:

PDF, 251 KB

english, 1996

19

Analysis of the growth processes of plasma-enhanced chemical vapor deposited diamond films from CO/H[sub 2] and CH[sub 4]/H[sub 2] mixtures using real-time spectroellipsometry

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

1997

Langue:

english

Fichier:

PDF, 519 KB

english, 1997

20

Spectroellipsometry Studies of Znl-x.cdxSe: From Optical Functions to Heterostructure Characterization

Lee, Joungchel, Hong, Byungyou, Burnham, J. S., Collins, R. W., Flack, F., Samarth, N.

Journal:

MRS Proceedings

Année:

1995

Langue:

english

Fichier:

PDF, 413 KB

english, 1995

21

Rotating-Compensator Multichannel Ellipsometry: Applications in Process Development for Nanocrystalline Diamond Thin Films

Collins, R. W., Lee, Joungchel, Rovira, P. I., An, Ilsin

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.56 MB

english, 1997

22

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Metrology, Inspection, and Process Control for Microlithography XXVII - Lithography focus/exposure control and corrections to improve CDU

Kim, Young Ki, Yelverton, Mark, Lee, Joungchel, Cheng, Jerry, Wei, Hong, Kim, Jeong Soo, Gutjahr, Karsten, Gao, Jie, Karur-Shanmugam, Ram, Herrera, Pedro, Huang, Kevin, Volkovich, Roie, Pierson, Bill,

Année:

2013

Langue:

english

Fichier:

PDF, 855 KB

english, 2013

23

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Metrology, Inspection, and Process Control for Microlithography XXIV - Monitoring of critical dimensions in the sidewall-transferred double-patterning process using scatterometry

Tanaka, Keisuke, Raymond, Christopher J., Lee, Joungchel

Année:

2010

Langue:

english

Fichier:

PDF, 213 KB

english, 2010

24

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Real-time optical CD metrology for litho process

Opsal, Jon L., Wen, Youxian, Lee, Joungchel, Smith, Walter L., Herr, Daniel J.

Année:

2003

Langue:

english

Fichier:

PDF, 431 KB

english, 2003

25

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - Application of scatterometry for evaluation of lithographic process and OPC model generation

Huang, Karen, Silver, Richard M., Lee, Joungchel, Wen, Youxian, Opsal, Jon

Année:

2005

Langue:

english

Fichier:

PDF, 456 KB

english, 2005